TiO2 Nano-Particles based Resistive Gas Sensor for Ammonia Gas
This work reports morphological and structural investigation of TiO2 nano-particles. Performance of the MEMS
based resistive ammonia gas sensor incorporated with chromium micro-heater has been observed. The results have been
noted w.r.t time as well as w.r.t concentration of the sample gas.
Keyword - Resistive Gas Sensor, MEMS, Nano-particles